What are the applications of aluminum nitride ceramic materials?


Jul 13, 2023

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Aluminum nitride is considered to be an ideal packaging material for a new generation of highly integrated semiconductor substrates and electronic devices. In addition, aluminum nitride ceramics can be used as crucibles for smelting non-ferrous metals and semiconductor materials gallium arsenide, evaporation boats, thermocouple protection tubes, high-temperature insulation parts, and can be used as high-temperature and corrosion-resistant structural ceramics and transparent aluminum nitride ceramic products. Therefore, it has become an inorganic material with a wide range of application prospects. The aluminum nitride substrate material
High electrical resistivity, high thermal conductivity, and low dielectric constant are the most basic requirements for substrate materials for electronic packaging. The packaging substrate should also have good thermal matching with silicon wafers, easy molding, high surface flatness, easy metallization, easy processing, low cost, and other characteristics and certain mechanical properties. Ceramics have become the most commonly used substrate material due to their good insulation properties, stable chemical properties, high thermal conductivity, and good high-frequency characteristics. Commonly used ceramic substrate materials include beryllium oxide, aluminum oxide, aluminum nitride, etc. Among them, the thermal conductivity of the aluminum oxide ceramic substrate is low, and the thermal expansion coefficient does not match that of silicon; although beryllium oxide has excellent properties, its powder has a dramatic effect. Poison; and aluminum nitride ceramics have high thermal conductivity, good thermal shock resistance, and still have good mechanical properties at high temperatures, and are considered the most ideal substrate material.
Transparent ceramic material
The transparency of ceramics generally refers to the passage of electromagnetic waves within a certain electromagnetic frequency range. For example, if electromagnetic waves in the infrared spectrum region can penetrate a ceramic sheet, the ceramic sheet is an infrared transparent ceramic. Pure aluminum nitride ceramics are colorless and transparent crystals with excellent optical properties and can be used as heat-resistant coatings for high-temperature infrared windows and fairings used in the manufacture of electronic optical devices. Therefore, aluminum nitride ceramics have good applications in the military industry.

Application of aluminum nitride in machinery industry
Aluminum nitride has excellent wear resistance and can be used as wear-resistant parts. However, due to the high cost of aluminum nitride, it can only be used in severely worn parts. Covering some easily oxidized metal or non-metal surfaces with an aluminum nitride coating can improve its oxidation resistance and wear resistance. Aluminum nitride can also be used as an anti-corrosion coating, such as the lining of corrosive substances in processors and containers.
Aluminum nitride high-temperature structure material
Aluminum nitride has good corrosion resistance and stability in ceramics at room temperature and high temperature. It will decompose only at 2450degC. It can be used as high-temperature refractory materials, such as crucibles and casting molds. Aluminum nitride ceramics can not be wetted by copper, aluminum, silver, and other substances, and are resistant to the dissolution of aluminum, iron, and aluminum alloys. It can be a good container and high-temperature protective layers, such as thermocouple protection tubes and sintering appliances; it can also resist high temperatures. Corrosive gas is used to prepare high-end parts of important semiconductor manufacturing equipment such as aluminum nitride ceramic electrostatic chuck. Since aluminum nitride is stable to molten salts such as gallium arsenide, using aluminum nitride crucibles instead of glass to synthesize gallium arsenide semiconductors can eliminate the pollution from silicon in the glass and obtain high-purity gallium arsenide semiconductors.
Aluminum Nitride Composite
Epoxy/aluminum nitride composite material: As a packaging material, it needs good thermal and heat dissipation capabilities, and this requirement is becoming more stringent. As a polymer material with good chemical properties and mechanical stability, epoxy resin is easy to cure, has low shrinkage, but has low thermal conductivity. By adding Nano aluminum nitride powder with excellent thermal conductivity to the epoxy resin, the thermal conductivity and strength of the material can be effectively improved.
N/AlN composite material: Titanium nitride has excellent properties such as high melting point, high hardness, the electrical and thermal conductivity of the same order of magnitude as metal, and corrosion resistance. A small amount of titanium nitride is added to the aluminum nitride matrix. According to the theory of conductive percolation, when the doping amount reaches a certain threshold, a conductive path is formed in the crystal, which can significantly adjust the volume resistivity of the aluminum nitride sintered body to reduce it by 2~ 4 orders of magnitude. Moreover, the composite ceramic materials prepared by the two materials have their own advantages, high hardness and wear resistance, and can also be used as high-grade abrasive materials.

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